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Chin. Opt. Lett.
 Home  List of Issues    Issue 02 , Vol. 03 , 2005    Read-only memory disk with AgOx super-resolution mask layer

Read-only memory disk with AgOx super-resolution mask layer
Feng Zhang, Yang Wang, Wendong Xu, Hongren Shi, Fuxi Gan
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

Chin. Opt. Lett., 2005, 03(02): pp.113-113-

Topic:Optical data storage
Keywords(OCIS Code): 160.4330  210.0210  310.0310  

A novel read-only memory (ROM) disk with an AgOx mask layer was proposed and studied in this letter. The AgOx films sputtered on the premastered substrates, with pits depth of 50 nm and pits length of 380 nm, were studied by an atomic force microscopy. The transmittances of these AgOx films were also measured by a spectrophotometer. Disk measurement was carried out by a dynamic setup with a laser wavelength of 632.8 nm and a lens numerical aperture (NA) of 0.40. The readout resolution limit of this setup was λ/(4NA) (400 nm). Results showed that the super-resolution readout happened only when the oxygen flow ratios were at suitable values for these disks. The best super-resolution performance was achieved at the oxygen flow ratio of 0.5 with the smoothest film surface. The super-resolution readout mechanism of these ROM disks was analyzed as well.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Get Citation: Feng Zhang, Yang Wang, Wendong Xu, Hongren Shi, Fuxi Gan, "Read-only memory disk with AgOx super-resolution mask layer," Chin. Opt. Lett. 03(02), 113-113-(2005)

Note: This work was supported by the National "863" Project of China (No. 2002AA313030), the National Natural Science Foundation of China (No. 60207005), and the Science and Technology Committee of Shanghai (No. 022261045, 03QG14057). F. Zhang's e-mail address is zhfeng0612@siom.ac.cn.


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